Semicon Russia 2010 (g)
centrotherm thermal solutions: develops and produces hightech production systems for the manufacture of a wide range of semiconductor components used for thermally activated processes. Product portfolio: Horizontal and vertical furnaces for Si and SiC high temperature processing, vacuum soldering systems, centrotherm SiTec: provides the full range of planning, technology and engineering services for the design and process optimization of polysilicon, ingot and wafer manufacturing. Product portfolio: CVD reactors, STC-TCS converters, vent gas recovery units and multi-crystalline ingot furnaces. FHR Anlagenbau: is your partner for innovative vacuum and plasma technologies like PVD, CVD and dry etching, RTP and UV-Ozone cleaners, for target materials, target bonding and other services for thin film technologies. All are 100% subsidiaries of the centrotherm photovoltaics group, leading in technology and services for solar cell and solar silicon production.